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Legal status
Application deemed to be withdrawn
| (51) | INT.CL.: (2006.01) |
C23C 18/18 C23C 18/20 |
| (11) | Number of the document | |
| (13) | Kind of document | A |
| (21) | Application number | 2008 082 |
| (22) | Date of filing the application | 2008-10-28 |
| (41) | Date of publication of the application | 2010-05-25 |
| (45) | Date of publication of patent |
| (71) |
CHEMIJOS INSTITUTAS,
A. Goštauto g. 9, LT-01108 Vilnius,
LT
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| (72) |
Leonas NARUŠKEVIČIUS, LT
Mykolas BARANAUSKAS, LT Birutė ŠIMKŪNAITĖ-STANYNIENĖ, LT |
| (73) |
CHEMIJOS INSTITUTAS,
A. Goštauto g. 9, LT-01108 Vilnius,
LT
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| (74) |
Milda TUMKEVIČIENĖ,
Patentinių paslaugų centras, UAB, Jono Basanavičiaus g. 11/1, LT-03108 Vilnius,
LT
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| (54) | PROCESS FOR ETCHING POLYIMIDE AND OTHER PLASTICS |