Patent details

EN | LT

LT - Būdas nuimti SIxNy ploną sluoksnį nuo SI paviršiaus nepažeidžiant p/n legiruoto Si sluoksnio

EN - METHOD FOR REMOVING A THIN LAYER OF SixNy FROM Si SURFACE WITHOUT AFFECT TO p/n ALLOY Si LAYER

Legal status

Patent lapsed (non-payment of fees)

Claims | Abstract | Licences/Sublicenses

Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.: (2011.01)	G01N 27/00

Patent
(11)	Number of the document	5900
(13)	Kind of document	B
(21)	Application number	2011 057
(22)	Date of filing the application	2011-06-16
(41)	Date of publication of the application	2012-12-27
(45)	Date of publication of patent	2013-02-25

Applicant
(71)	UAB "Precizika - MET SC", Žirmūnų g. 139, LT-09120 Vilnius, LT

Inventors
(72)	Julius JANUŠONIS, LT Valdemaras JUZUMAS, LT Vida JANUŠONIENĖ, LT Lina JARAMINĖ, LT

Grantee
(73)	UAB "Precizika - MET SC", Žirmūnų g. 139, LT-09120 Vilnius, LT

Attorney or representative
(74)	Reda ŽABOLIENĖ, METIDA, Verslo centras "VERTAS", Gynėjų g. 16, LT-01109 Vilnius, LT

Title
(54)	METHOD FOR REMOVING A THIN LAYER OF SixNy FROM Si SURFACE WITHOUT AFFECT TO p/n ALLOY Si LAYER

Last renewal fee
	Payment date	Validity (years)	Amount
	2013-05-13	3	280.00 LTL

Legal status
	Patent lapsed (non-payment of fees)
	Invalidation date	2014-06-16