|
|
|
|
|
Legal status
Patent lapsed (non-payment of fees)
| (51) | INT.CL.: (2014.01) |
H01L 27/00 H01L 21/00 H01L 31/00 C23C 18/00 |
| (11) | Number of the document | 6081 |
| (13) | Kind of document | B |
| (21) | Application number | 2013 006 |
| (22) | Date of filing the application | 2013-01-16 |
| (41) | Date of publication of the application | 2014-07-25 |
| (45) | Date of publication of patent | 2014-10-27 |
| (71) |
UAB "Precizika - MET SC",
Žirmūnų g. 139, LT-09120 Vilnius,
LT
|
| (72) |
Vida Katryna JANUŠONIENĖ, LT
Julius JANUŠONIS, LT Lina JARAMINĖ, LT Tomas LUKŠTARAUPIS, LT Valius ČYRAS, LT |
| (73) |
UAB "Precizika - MET SC",
Žirmūnų g. 139, LT-09120 Vilnius,
LT
|
| (74) |
Reda ŽABOLIENĖ,
METIDA, Verslo centras "VERTAS", Gynėjų g. 16, LT-01109 Vilnius,
LT
|
| (54) | NEW SOLAR CELL EMTTER CONTACT GRID FORMING METHOD USING THE FULL CHEMICAL METALLIZATION COATING METHOD |
| Patent lapsed (non-payment of fees) | ||
| Invalidation date | 2015-01-16 |