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Legal status
Application deemed to be withdrawn
| (51) | INT.CL.: (2015.01) |
C03C 15/00 G01N 1/00 |
| (11) | Number of the document | |
| (13) | Kind of document | A |
| (21) | Application number | 2013 108 |
| (22) | Date of filing the application | 2013-10-07 |
| (41) | Date of publication of the application | 2015-04-27 |
| (45) | Date of publication of patent |
| (71) |
UAB "Optida",
A. Goštauto g. 12, LT-01108 Vilnius,
LT
|
| (72) |
Rytis BUZELIS, LT
Kęstutis JUŠKEVIČIUS, LT Simonas KIČAS, LT Tomas TOLENIS, LT |
| (73) |
Valstybinis mokslinių tyrimų institutas FIZINIŲ IR TECHNOLOGIJOS MOKSLŲ CENTRAS,
Savanorių pr. 231, LT-02300 Vilnius,
LT
UAB "Optida", A. Goštauto g. 12, LT-01108 Vilnius, LT |
| (74) |
Lina MEŠKAUSKIENĖ,
Advokatės Meškauskienės kontora, Pylimo g. 19, LT-01141 Vilnius,
LT
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| (54) | METHOD FOR INCREASING LASER INDUCED DAMAGE THRESHOLD BY ETCHING OF OPTICAL SUBSTRATES |