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LT - Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus
EN - METHOD FOR INCREASING LASER INDUCED DAMAGE THRESHOLD BY ETCHING OF OPTICAL SUBSTRATES

Legal status

Application deemed to be withdrawn

Bibliographic data
Indications of the International Patent Classification (IPC)
(51) INT.CL.: (2015.01) C03C 15/00
G01N 1/00
Patent
(11) Number of the document
(13) Kind of document A
(21) Application number 2013 108
(22) Date of filing the application 2013-10-07
(41) Date of publication of the application 2015-04-27
(45) Date of publication of patent
Applicant
(71) UAB "Optida", A. Goštauto g. 12, LT-01108 Vilnius, LT
Inventors
(72) Rytis BUZELIS, LT
Kęstutis JUŠKEVIČIUS, LT
Simonas KIČAS, LT
Tomas TOLENIS, LT
Grantee
(73) Valstybinis mokslinių tyrimų institutas FIZINIŲ IR TECHNOLOGIJOS MOKSLŲ CENTRAS, Savanorių pr. 231, LT-02300 Vilnius, LT
UAB "Optida", A. Goštauto g. 12, LT-01108 Vilnius, LT
Attorney or representative
(74) Lina MEŠKAUSKIENĖ, Advokatės Meškauskienės kontora, Pylimo g. 19, LT-01141 Vilnius, LT
Title
(54) METHOD FOR INCREASING LASER INDUCED DAMAGE THRESHOLD BY ETCHING OF OPTICAL SUBSTRATES