LT - Oksidų nanokristalinių klasterių gavimo ant vandenyje tirpių medžiagų, panaudojant magnetroninį garinimą, būdas
EN - A METHOD OF NANOCRYSTALLINE CLUSTER FORMATION ON WATER SOLUBLE MATERIALS BY USING MAGNETRON SPUTTERING
Legal status
Patent lapsed (non-payment of fees)
Bibliographic data
Indications of the International Patent Classification (IPC)
| (51) |
INT.CL.: (2016.01) |
C23C 16/00
|
Patent
| (11) |
Number of the document |
6290 |
| (13) |
Kind of document |
B |
| (21) |
Application number |
2014 509 |
| (22) |
Date of filing the application |
2014-11-11 |
| (41) |
Date of publication of the application |
2016-06-27 |
| (45) |
Date of publication of patent |
2016-08-10 |
Applicant
| (71) |
Lietuvos energetikos institutas,
Breslaujos g. 3, LT-44403 Kaunas,
LT
|
Inventors
| (72) |
Martynas LELIS, LT
Darius MILČIUS, LT
Simona TUČKUTĖ, LT
Marius URBONAVIČIUS, LT
|
Grantee
| (73) |
Lietuvos energetikos institutas,
Breslaujos g. 3, LT-44403 Kaunas,
LT
|
Attorney or representative
| (74) |
Gediminas PRANEVIČIUS,
Advokatų profesinė bendrija IP FORMA, Užupio g. 30, LT-01203 Vilnius,
LT
|
Title
| (54) |
A METHOD OF NANOCRYSTALLINE CLUSTER FORMATION ON WATER SOLUBLE MATERIALS BY USING MAGNETRON SPUTTERING
|
Last renewal fee
|
Payment date |
Validity (years) |
Amount |
|
2019-09-20 |
6 |
139.00
EUR
|
Legal status
|
Patent lapsed (non-payment of fees)
|
|
|
Invalidation date |
2020-11-11 |
