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Legal status
Patent lapsed (non-payment of fees)
| (51) | INT.CL.: (2006.01) |
H01L 21/66 H01L 21/66 |
| (11) | Number of the document | 2484 |
| (13) | Kind of document | B |
| (21) | Application number | RP1351 |
| (22) | Date of filing the application | 1993-09-30 |
| (41) | Date of publication of the application | |
| (45) | Date of publication of patent | 1994-02-15 |
| (86) | Number | 1143263 |
| Date | 1983-11-09 |
| (71) |
Sigitas JONELIŪNAS,
Žaibo g. 37-1, 3029 Kaunas,
LT
Liudvikas PRANEVIČIUS, Partizanų g. 228-4, 3041 Kaunas, LT Arminas RAGAUSKAS, Saulės g. 39-10, 3031 Kaunas, LT |
| (72) |
Liudvikas PRANEVIČIUS, LT
Sigitas JONELIŪNAS, LT Arminas RAGAUSKAS, LT |
| (73) |
Sigitas JONELIŪNAS,
Žaibo g. 37-1, 3029 Kaunas,
LT
Liudvikas PRANEVIČIUS, Partizanų g. 228-4, 3041 Kaunas, LT Arminas RAGAUSKAS, Saulės g. 39-10, 3031 Kaunas, LT |
| (74) |
| (54) |
| Payment date | Validity (years) | Amount | |
| 1997-09-25 | 7 | 61.00 LTL |
| Patent lapsed (non-payment of fees) | ||
| Invalidation date | 1998-09-30 |