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LT - PECVD coating using an organosilicon precursor
EN - PECVD coating using an organosilicon precursor

Legal status

Patent not validated

Bibliographic data
Indications of the International Patent Classification (IPC)
(51) INT.CL. C23C 16/505
C23C 16/40
C23C 16/52
G01N 15/08
A61B 5/15
European patent
(11) Number of the document 2251455
(13) Kind of document T
(96) European patent application number 10162761.0
Date of filing the European patent application 2010-05-12
(97) Date of publication of the European application 2010-11-17
(45) Date of publication and mention of the grant of the patent 2017-09-06
(46) Date of publication of the claims translation
Priority applications
(30) Number Date Country code
177984 P 2009-05-13 US
222727 P 2009-07-02 US
213904 P 2009-07-24 US
234505 P 2009-08-17 US
261321 P 2009-11-14 US
263289 P 2009-11-20 US
285813 P 2009-12-11 US
298159 P 2010-01-25 US
299888 P 2010-01-29 US
318197 P 2010-03-26 US
333625 P 2010-05-11 US
Inventors
(72)
Felts, John T., US
Fisk, Thomas E., US
Abrams, Robert S., US
Pangborn, Robert J., US
Sagona, Peter J., US
Grantee
(73) SiO2 Medical Products, Inc., 2250 Riley Street, Auburn, AL 36832, US
Title
(54) PECVD coating using an organosilicon precursor
  PECVD coating using an organosilicon precursor