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LT - AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES FOR ELECTRICAL, MECHANICAL AND OPTICAL DEVICES
EN - AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES FOR ELECTRICAL, MECHANICAL AND OPTICAL DEVICES

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Bibliographic data
Indications of the International Patent Classification (IPC)
(51) INT.CL. C09G 1/02
C09G 1/04
C09G 1/18
C09K 3/14
C08L 33/24
H01L 21/3105
European patent
(11) Number of the document 2614121
(13) Kind of document T
(96) European patent application number 11823139.8
Date of filing the European patent application 2011-09-06
(97) Date of publication of the European application 2013-07-17
(45) Date of publication and mention of the grant of the patent 2019-03-06
(46) Date of publication of the claims translation
PCT application
(86) Number PCT/IB2011/053884
Date 2011-09-06
PCT application publication
(87) Number WO 2012/032461
Date 2012-03-15
Priority applications
(30) Number Date Country code
380721 P 2010-09-08 US
Inventors
(72)
LI, Yuzhuo, DE
CHU, Jea-Ju, TW
VENKATARAMAN, Shyam Sundar, TW
USMAN IBRAHIM, Sheik Ansar, US
PINDER, Harvey Wayne, US
Grantee
(73) BASF SE, Carl-Bosch-Strasse 38, 67056 Ludwigshafen am Rhein, DE
Title
(54) AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES FOR ELECTRICAL, MECHANICAL AND OPTICAL DEVICES
  AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES FOR ELECTRICAL, MECHANICAL AND OPTICAL DEVICES
Last update date 2021-04-30