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LT - Beschichtungsquelle und Verfahren zu deren Herstellung

EN - Coating source and method for its preparation

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Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.	C23C 14/32
		C23C 14/34
		H01J 37/34
		B22F 7/06
		B22F 7/08

European patent
(11)	Number of the document	2754729
(13)	Kind of document	T
(96)	European patent application number	14001267.5
	Date of filing the European patent application	2011-04-12
(97)	Date of publication of the European application	2014-07-16
(45)	Date of publication and mention of the grant of the patent	2015-06-03
(46)	Date of publication of the claims translation

Priority applications
(30)	Number	Date	Country code
	23910 U	2010-04-14	AT

Inventors
(72)	Polcik, Peter, AT Polzer, Conrad Wilhelm, DE Perl, Matthias, AT Schlichtherle, Stefan, AT Strauss, Georg, AT

Grantee
(73)	Plansee SE, Metallwerk-Plansee-Str. 71, 6600 Reutte, AT

Title
(54)	Beschichtungsquelle und Verfahren zu deren Herstellung
	Coating source and method for its preparation