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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/311 | |
| H01L 21/02 | |||
| C11D 3/00 | |||
| C11D 7/32 | |||
| C11D 7/50 | |||
| C11D 11/00 |
| (11) | Patento numeris | 3077129 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14867771.9 |
| Europos patento paraiškos padavimo data | 2014-12-03 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-10-12 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2020-11-11 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2014/068294 |
| Data | 2014-12-03 |
| (87) | Numeris | WO 2015/084921 |
| Data | 2015-06-11 |
| (30) | Numeris | Data | Šalis |
| 201361912697 P | 2013-12-06 | US | |
| 201461936999 P | 2014-02-07 | US |
| (72) |
TAKAHASHI, Tomonori, US
DU, Bing, US
WOJTCZAK, William A., US
DORY, Thomas, US
KNEER, Emil A., US
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| (73) |
FujiFilm Electronic Materials USA, Inc.,
80 Circuit Drive, North Kingstown, RI 02852,
US
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| (54) | CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES |
| CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES |