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Legal status
Patent not validated
| (51) | INT.CL. | H01S 3/00 | (2006.01) |
| H01S 3/005 | (2013.01) | ||
| G03F 7/20 | (2006.01) | ||
| H01S 3/0071 | (2013.01) | ||
| H01S2301/206 | (2013.01) | ||
| G03F 7/70025 | (2013.01) | ||
| H01S 3/0057 | (2013.01) |
| (11) | Number of the document | 3117495 |
| (13) | Kind of document | T |
| (96) | European patent application number | 15809376.5 |
| Date of filing the European patent application | 2015-06-18 | |
| (97) | Date of publication of the European application | 2017-01-18 |
| (45) | Date of publication and mention of the grant of the patent | 2023-04-26 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2015/036374 |
| Date | 2015-06-18 |
| (87) | Number | WO 2015/195877 |
| Date | 2015-12-23 |
| (30) | Number | Date | Country code |
| 201462015016 P | 2014-06-20 | US | |
| 201462038471 P | 2014-08-18 | US | |
| 201514596738 | 2015-01-14 | US |
| (72) |
CHUANG, Yung-Ho Alex , US
LOIU, Justin Dianhuan , US
LU, Xiaoxu , US
ARMSTRONG, J. Joseph , US
DENG, Yujun , US
FIELDEN, John , US
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| (73) |
Kla-Tencor Corporation ,
One Technology Drive, Milpitas, CA 95035,
US
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| (54) | LASER REPETITION RATE MULTIPLIER AND FLAT-TOP BEAM PROFILE GENERATORS USING MIRRORS AND/OR PRISMS |
| LASER REPETITION RATE MULTIPLIER AND FLAT-TOP BEAM PROFILE GENERATORS USING MIRRORS AND/OR PRISMS |