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LT - OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD
EN - OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD

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Bibliographic data
Indications of the International Patent Classification (IPC)
(51) INT.CL. G01J 3/443 (2006.01)
G01N 21/64 (2013.01)
G01N 21/64 (2006.01)
G01J 3/0254 (2013.01)
G01J 3/02 (2006.01)
G01J 3/443 (2013.01)
European patent
(11) Number of the document 3147638
(13) Kind of document T
(96) European patent application number 15796210.1
Date of filing the European patent application 2015-04-07
(97) Date of publication of the European application 2017-03-29
(45) Date of publication and mention of the grant of the patent 2021-12-08
(46) Date of publication of the claims translation
PCT application
(86) Number PCT/JP2015/060876
Date 2015-04-07
PCT application publication
(87) Number WO 2015/178113
Date 2015-11-26
Priority applications
(30) Number Date Country code
2014106816 2014-05-23 JP
Inventors
(72)
EURA, Shigeru , JP
SUZUKI, Kengo , JP
IKEMURA, Kenichiro , JP
IGUCHI, Kazuya , JP
Grantee
(73) Hamamatsu Photonics K.K. , 1126-1, Ichino-cho Higashi-ku, Hamamatsu-shi, Shizuoka 435-8558, JP
Title
(54) OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD
  OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD