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Legal status
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(51) | INT.CL. | G01J 3/443 | (2006.01) |
G01N 21/64 | (2013.01) | ||
G01N 21/64 | (2006.01) | ||
G01J 3/0254 | (2013.01) | ||
G01J 3/02 | (2006.01) | ||
G01J 3/443 | (2013.01) |
(11) | Number of the document | 3147638 |
(13) | Kind of document | T |
(96) | European patent application number | 15796210.1 |
Date of filing the European patent application | 2015-04-07 | |
(97) | Date of publication of the European application | 2017-03-29 |
(45) | Date of publication and mention of the grant of the patent | 2021-12-08 |
(46) | Date of publication of the claims translation |
(86) | Number | PCT/JP2015/060876 |
Date | 2015-04-07 |
(87) | Number | WO 2015/178113 |
Date | 2015-11-26 |
(30) | Number | Date | Country code |
2014106816 | 2014-05-23 | JP |
(72) |
EURA, Shigeru , JP
SUZUKI, Kengo , JP
IKEMURA, Kenichiro , JP
IGUCHI, Kazuya , JP
|
(73) |
Hamamatsu Photonics K.K. ,
1126-1, Ichino-cho
Higashi-ku, Hamamatsu-shi, Shizuoka 435-8558,
JP
|
(54) | OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD |
OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD |