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Legal status
Patent not validated
| (51) | INT.CL. | C30B 29/68 | (2006.01) |
| C30B 23/02 | (2013.01) | ||
| H01L 21/18 | (2006.01) | ||
| C30B 29/40 | (2013.01) | ||
| G02B 5/08 | (2006.01) | ||
| C30B 29/68 | (2013.01) | ||
| C30B 23/02 | (2006.01) | ||
| C30B 33/06 | (2013.01) | ||
| C30B 29/40 | (2006.01) | ||
| G02B 5/0833 | (2013.01) | ||
| C30B 33/06 | (2006.01) | ||
| H01L 21/187 | (2013.01) |
| (11) | Number of the document | 3219834 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16199794.5 |
| Date of filing the European patent application | 2016-11-21 | |
| (97) | Date of publication of the European application | 2017-09-20 |
| (45) | Date of publication and mention of the grant of the patent | 2022-03-02 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 16160751 | 2016-03-16 | EP |
| (72) |
Deutsch, Christoph , AT
Cole, Garrett , US
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| (73) |
Thorlabs Inc. ,
56 Sparta Avenue, Newton, New Jersey 07860,
US
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| (54) | SUBSTRATE-TRANSFERRED STACKED OPTICAL COATINGS |
| SUBSTRATE-TRANSFERRED STACKED OPTICAL COATINGS |