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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/673 | (2006.01) |
| H01L 21/67793 | (2013.01) | ||
| B65G 1/14 | (2006.01) | ||
| B65G 1/14 | (2013.01) | ||
| H01L 21/677 | (2006.01) | ||
| H01L 21/67389 | (2013.01) | ||
| H01L 21/67769 | (2013.01) |
| (11) | Number of the document | 3343597 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16841269.0 |
| Date of filing the European patent application | 2016-07-04 | |
| (97) | Date of publication of the European application | 2018-07-04 |
| (45) | Date of publication and mention of the grant of the patent | 2022-04-20 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2016/069770 |
| Date | 2016-07-04 |
| (87) | Number | WO 2017/038237 |
| Date | 2017-03-09 |
| (30) | Number | Date | Country code |
| 2015168594 | 2015-08-28 | JP |
| (72) |
MURATA, Masanao , JP
TOMINAGA, Tadamasa , JP
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| (73) |
Murata Machinery, Ltd. ,
3 Minami Ochiai-cho
Kisshoin
Minami-ku, Kyoto-shi, Kyoto 601-8326,
JP
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| (54) | STORAGE DEVICE AND STORAGE METHOD |
| STORAGE DEVICE AND STORAGE METHOD |