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Legal status
Patent not validated
| (51) | INT.CL. | H01L 29/778 | (2006.01) |
| B82Y 10/00 | (2013.01) | ||
| H01L 29/739 | (2006.01) | ||
| H01L 29/66356 | (2013.01) | ||
| B82Y 10/00 | (2011.01) | ||
| H01L 29/7391 | (2013.01) | ||
| H01L 29/205 | (2006.01) | ||
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| H01L 29/42392 | (2013.01) | ||
| H01L 29/06 | (2006.01) | ||
| H01L 29/78681 | (2013.01) | ||
| H01L 21/331 | (2006.01) | ||
| H01L 29/0676 | (2013.01) | ||
| H01L 21/336 | (2006.01) | ||
| H01L 29/205 | (2013.01) | ||
| H01L 29/78642 | (2013.01) | ||
| H01L 29/78696 | (2013.01) |
| (11) | Number of the document | 3358604 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16851500.5 |
| Date of filing the European patent application | 2016-09-27 | |
| (97) | Date of publication of the European application | 2018-08-08 |
| (45) | Date of publication and mention of the grant of the patent | 2024-08-07 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2016/078393 |
| Date | 2016-09-27 |
| (87) | Number | WO 2017/057329 |
| Date | 2017-04-06 |
| (30) | Number | Date | Country code |
| 2015193196 | 2015-09-30 | JP |
| (72) |
FUKUI, Takashi , JP
TOMIOKA, Katsuhiro , JP
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| (73) |
Japan Science and Technology Agency ,
4-1-8, Honcho,
Kawaguchi-shi,, Saitama
332-0012,
JP
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| (54) | TUNNEL FIELD EFFECT TRANSISTOR |
| TUNNEL FIELD EFFECT TRANSISTOR |