|
|
|
|
|
Legal status
Patent not validated
| (51) | INT.CL. | G03F 7/20 | (2006.01) |
| G03F 7/70341 | (2013.01) | ||
| G03F 7/70733 | (2013.01) | ||
| G03F 7/70925 | (2013.01) |
| (11) | Number of the document | 3377942 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16787344.7 |
| Date of filing the European patent application | 2016-09-30 | |
| (97) | Date of publication of the European application | 2018-09-26 |
| (45) | Date of publication and mention of the grant of the patent | 2023-12-20 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/EP2016/073380 |
| Date | 2016-09-30 |
| (87) | Number | WO 2017/084797 |
| Date | 2017-05-26 |
| (30) | Number | Date | Country code |
| 15195532 | 2015-11-20 | EP | |
| 16157155 | 2016-02-24 | EP |
| (72) |
KANEHARA, Junichi , NL
BUTLER, Hans , NL
DE WIT, Paul Corné Henri , NL
VAN DER PASCH, Engelbertus Antonius Fransiscus , NL
|
| (73) |
ASML Netherlands B.V. ,
P.O. Box 324, 5500 AH Veldhoven,
NL
|
| (54) | LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS |
| LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS |