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Legal status
Patent not validated
| (51) | INT.CL. | G05B 13/04 | (2006.01) |
| B24B 49/00 | (2013.01) | ||
| B24B 49/00 | (2006.01) | ||
| B24B 49/16 | (2013.01) | ||
| B24B 49/16 | (2006.01) | ||
| G05B 19/18 | (2013.01) | ||
| G05B2219/45161 | (2013.01) | ||
| G05B2219/45199 | (2013.01) |
| (11) | Number of the document | 3457225 |
| (13) | Kind of document | T |
| (96) | European patent application number | 17871008.3 |
| Date of filing the European patent application | 2017-10-18 | |
| (97) | Date of publication of the European application | 2019-03-20 |
| (45) | Date of publication and mention of the grant of the patent | 2023-03-01 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/IB2017/056458 |
| Date | 2017-10-18 |
| (87) | Number | WO 2018/091989 |
| Date | 2018-05-24 |
| (30) | Number | Date | Country code |
| 16113260 | 2016-11-18 | HK |
| (72) |
CHEN, Yongqiang , HK
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| (73) |
Tung Hing Automation Investment Limited ,
RM 1721, 17/F
Metro Centre II
21 Lam Hing St.
Kowloon Bay, Kowloon, Hong Kong,
HK
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| (54) | METHOD FOR DETECTION, CONTROL AND AUTOMATIC COMPENSATION OF PRESSURE DURING POLISHING |
| METHOD FOR DETECTION, CONTROL AND AUTOMATIC COMPENSATION OF PRESSURE DURING POLISHING |