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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/68 | (2006.01) |
| G03F 7/7075 | (2013.01) | ||
| H01L 21/687 | (2006.01) | ||
| H01L 21/68771 | (2013.01) | ||
| G03F 7/20 | (2006.01) | ||
| G03F 7/0002 | (2013.01) | ||
| H01L 21/67 | (2006.01) | ||
| H01L 21/67754 | (2013.01) | ||
| G03F 7/00 | (2006.01) | ||
| H01L 21/68785 | (2013.01) | ||
| B29C 59/02 | (2006.01) | ||
| B29C 59/00 | (2006.01) | ||
| B29C 43/02 | (2006.01) | ||
| H01L 21/677 | (2006.01) |
| (11) | Number of the document | 3535781 |
| (13) | Kind of document | T |
| (96) | European patent application number | 17868146.6 |
| Date of filing the European patent application | 2017-09-27 | |
| (97) | Date of publication of the European application | 2019-09-11 |
| (45) | Date of publication and mention of the grant of the patent | 2022-01-05 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2017/053706 |
| Date | 2017-09-27 |
| (87) | Number | WO 2018/084965 |
| Date | 2018-05-11 |
| (30) | Number | Date | Country code |
| 201662416916 P | 2016-11-03 | US |
| (72) |
PATTERSON, Roy , US
AHAMED, Yaseer, A. , US
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| (73) |
Molecular Imprints, Inc. ,
9801 Metric Boulevard
Suite 100, Austin, Texas 78758,
US
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| (54) | SUBSTRATE LOADING SYSTEM |
| SUBSTRATE LOADING SYSTEM |