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Legal status
Patent not validated
| (51) | INT.CL. | B65G 1/00 | (2006.01) |
| H01L 21/673 | (2006.01) | ||
| H01L 21/677 | (2006.01) | ||
| H01L 21/67 | (2006.01) |
| (11) | Number of the document | 3581521 |
| (13) | Kind of document | T |
| (96) | European patent application number | 18751500.2 |
| Date of filing the European patent application | 2018-01-11 | |
| (97) | Date of publication of the European application | 2019-12-18 |
| (45) | Date of publication and mention of the grant of the patent | 2021-08-11 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2018/000435 |
| Date | 2018-01-11 |
| (87) | Number | WO 2018/146986 |
| Date | 2018-08-16 |
| (30) | Number | Date | Country code |
| 2017020225 | 2017-02-07 | JP |
| (72) |
KUSAMA, Yu , JP
SUZUKI, Toru , JP
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| (73) |
Murata Machinery, Ltd. ,
3 Minami Ochiai-cho
Kisshoin
Minami-ku, Kyoto-shi, Kyoto 601-8326,
JP
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| (54) | STOCKER |
| STOCKER |