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Legal status
Patent not validated
| (51) | INT.CL. | C09G 1/02 | (2006.01) |
| C09G 1/02 | (2013.01) | ||
| H01L 21/3105 | (2006.01) | ||
| H01L 21/31053 | (2013.01) |
| (11) | Number of the document | 3587525 |
| (13) | Kind of document | T |
| (96) | European patent application number | 19183705.3 |
| Date of filing the European patent application | 2019-07-01 | |
| (97) | Date of publication of the European application | 2020-01-01 |
| (45) | Date of publication and mention of the grant of the patent | 2023-11-22 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201862692639 P | 2018-06-29 | US | |
| 201862692633 P | 2018-06-29 | US | |
| 201916450784 | 2019-06-24 | US |
| (72) |
SHI, Xiaobo , US
MURELLA, Krishna, P. , US
ROSE, Joseph, D. , US
ZHOU, Hongjun , US
O'NEILL, Mark, Leonard , US
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| (73) |
Versum Materials US, LLC ,
8555 S. River Parkway, Tempe, AZ 85284,
US
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| (54) | LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHING |
| LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHING |