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Legal status
Patent not validated
| (51) | INT.CL. | H01J 37/28 | (2006.01) |
| H01J 37/28 | (2013.01) | ||
| H01J 37/09 | (2006.01) | ||
| H01J2237/06341 | (2013.01) | ||
| H01J 37/141 | (2006.01) | ||
| H01J2237/28 | (2013.01) | ||
| H01J 37/317 | (2006.01) | ||
| H01J2237/2817 | (2013.01) | ||
| H01J2237/31754 | (2013.01) | ||
| H01J 37/09 | (2013.01) | ||
| H01J 37/141 | (2013.01) | ||
| H01J 37/3174 | (2013.01) | ||
| H01J2237/04756 | (2013.01) | ||
| H01J2237/04922 | (2013.01) | ||
| H01J2237/1415 | (2013.01) | ||
| H01J2237/24592 | (2013.01) |
| (11) | Number of the document | 3594988 |
| (13) | Kind of document | T |
| (96) | European patent application number | 19183682.4 |
| Date of filing the European patent application | 2019-07-01 | |
| (97) | Date of publication of the European application | 2020-01-15 |
| (45) | Date of publication and mention of the grant of the patent | 2025-01-01 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201816033987 | 2018-07-12 | US |
| (72) |
Adamec, Pavel , DE
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| (73) |
ICT Integrated Circuit Testing
Gesellschaft für Halbleiterprüftechnik mbH ,
Ammerthalstrasse 20, 85551 Heimstetten,
DE
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| (54) | HIGH PERFORMANCE INSPECTION SCANNING ELECTRON MICROSCOPE DEVICE AND METHOD OF OPERATING THE SAME |
| HIGH PERFORMANCE INSPECTION SCANNING ELECTRON MICROSCOPE DEVICE AND METHOD OF OPERATING THE SAME |