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Legal status
Patent not validated
| (51) | INT.CL. | B65G 1/04 | (2006.01) |
| B65G 1/04 | (2013.01) | ||
| H01L 21/677 | (2006.01) | ||
| H01L 21/67727 | (2013.01) | ||
| H01L 21/67769 | (2013.01) | ||
| H01L 21/67736 | (2013.01) |
| (11) | Number of the document | 3647230 |
| (13) | Kind of document | T |
| (96) | European patent application number | 18824985.8 |
| Date of filing the European patent application | 2018-06-01 | |
| (97) | Date of publication of the European application | 2020-05-06 |
| (45) | Date of publication and mention of the grant of the patent | 2023-03-22 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2018/021167 |
| Date | 2018-06-01 |
| (87) | Number | WO 2019/003799 |
| Date | 2019-01-03 |
| (30) | Number | Date | Country code |
| 2017128570 | 2017-06-30 | JP |
| (72) |
MOTOORI, Yoichi , JP
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| (73) |
Murata Machinery, Ltd. ,
3 Minami Ochiai-cho
Kisshoin
Minami-ku, Kyoto-shi, Kyoto 601-8326,
JP
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| (54) | CONVEYING SYSTEM AND CONVEYING METHOD |
| CONVEYING SYSTEM AND CONVEYING METHOD |