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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | C09G 1/02 | (2006.01) |
| C09G 1/02 | (2013.01) | ||
| C09K 3/14 | (2006.01) | ||
| C09K 3/1445 | (2013.01) | ||
| H01L 21/3105 | (2006.01) | ||
| C09K 3/1463 | (2013.01) | ||
| H01L 21/31053 | (2013.01) |
| (11) | Patento numeris | 3647384 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 19206672.8 |
| Europos patento paraiškos padavimo data | 2019-10-31 | |
| (97) | Europos patento paraiškos paskelbimo data | 2020-05-06 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2024-06-12 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (30) | Numeris | Data | Šalis |
| 201862753431 P | 2018-10-31 | US | |
| 201916664924 | 2019-10-27 | US |
| (72) |
SHI, Xiaobo , US
MURELLA, Krishna P. , US
ROSE, Joseph D , US
ZHOU, Hongjun , US
O'NEILL, Mark Leonard , US
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| (73) |
Versum Materials US, LLC ,
8555 S. River Parkway, Tempe, AZ 85284,
US
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| (54) | SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESS |
| SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESS |