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Legal status
Patent not validated
| (51) | INT.CL. | C23C 16/32 | (2006.01) |
| C07F 7/28 | (2013.01) | ||
| C23C 16/455 | (2006.01) | ||
| C07F 17/00 | (2013.01) | ||
| H01L 21/316 | (2013.01) | ||
| C23C 16/32 | (2013.01) | ||
| C23C 16/45553 | (2013.01) | ||
| C23C 16/45536 | (2013.01) |
| (11) | Number of the document | 3647460 |
| (13) | Kind of document | T |
| (96) | European patent application number | 18823105.4 |
| Date of filing the European patent application | 2018-05-17 | |
| (97) | Date of publication of the European application | 2020-05-06 |
| (45) | Date of publication and mention of the grant of the patent | 2023-04-12 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2018/019080 |
| Date | 2018-05-17 |
| (87) | Number | WO 2019/003695 |
| Date | 2019-01-03 |
| (30) | Number | Date | Country code |
| 2017127401 | 2017-06-29 | JP |
| (72) |
NISHIDA, Akihiro , JP
OKADA, Nana , JP
OOE, Yoshiki , JP
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| (73) |
Adeka Corporation ,
2-35, Higashiogu 7-chome
Arakawa-ku, Tokyo 116-8554,
JP
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| (54) | THIN FILM PRODUCTION METHOD AND NOVEL COMPOUND |
| THIN FILM PRODUCTION METHOD AND NOVEL COMPOUND |