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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/67 | (2006.01) |
| H01L 21/67017 | (2013.01) | ||
| H01L 21/6719 | (2013.01) | ||
| C21D 1/773 | (2013.01) | ||
| H01L 21/67109 | (2013.01) |
| (11) | Number of the document | 3652778 |
| (13) | Kind of document | T |
| (96) | European patent application number | 18831823.2 |
| Date of filing the European patent application | 2018-06-14 | |
| (97) | Date of publication of the European application | 2020-05-20 |
| (45) | Date of publication and mention of the grant of the patent | 2023-08-09 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2018/037539 |
| Date | 2018-06-14 |
| (87) | Number | WO 2019/013920 |
| Date | 2019-01-17 |
| (30) | Number | Date | Country code |
| 201762532715 P | 2017-07-14 | US | |
| 201715835378 | 2017-12-07 | US |
| (72) |
KHAN, Adib , US
LIANG, Qiwei , US
MALIK, Sultan , US
WONG, Keith Tatseun , US
NEMANI, Srinivas D. , US
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| (73) |
Micromaterials LLC ,
2711 Centerville Road
Suite 400, Wilmington, Delaware 19808,
US
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| (54) | GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBER |
| GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBER |