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Legal status
Patent not validated
| (51) | INT.CL. | G01N 21/41 | (2006.01) |
| H01L 31/0232 | (2013.01) | ||
| G01N 27/00 | (2006.01) | ||
| H01L 31/108 | (2013.01) | ||
| H01L 31/0232 | (2014.01) | ||
| G01N 27/129 | (2013.01) | ||
| H01L 31/108 | (2006.01) | ||
| G01N 21/553 | (2013.01) | ||
| G01N 27/12 | (2006.01) | ||
| G01N 21/552 | (2014.01) |
| (11) | Number of the document | 3667297 |
| (13) | Kind of document | T |
| (96) | European patent application number | 18845108.2 |
| Date of filing the European patent application | 2018-08-09 | |
| (97) | Date of publication of the European application | 2020-06-17 |
| (45) | Date of publication and mention of the grant of the patent | 2023-09-27 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2018/029979 |
| Date | 2018-08-09 |
| (87) | Number | WO 2019/031591 |
| Date | 2019-02-14 |
| (30) | Number | Date | Country code |
| 2017155187 | 2017-08-10 | JP |
| (72) |
SUZUKI, Hironori , JP
ALLISON, Giles , JP
SASAKI, Masanori , JP
HAYASHI, Koki , JP
MISAWA, Hiroaki , JP
UENO, Kosei , JP
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| (73) |
AISIN CORPORATION ,
2-1, Asahi-machi,, Kariya-shi, Aichi 448-8650,
JP
National University Corporation Hokkaido University , Kita 8-jyo Nishi 5-chome Kita-ku, Sapporo-shi, Hokkaido 060-0808, JP |
| (54) | ELECTRICAL-MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR |
| ELECTRICAL-MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR |