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Legal status
Patent not validated
| (51) | INT.CL. | C23C 14/34 | (1985.01) |
| C23C 14/3407 | (2013.01) | ||
| H01J 37/34 | (1968.09) | ||
| H01J 37/3435 | (2013.01) | ||
| H01J 37/347 | (2013.01) | ||
| H01J 37/3491 | (2013.01) | ||
| H01J 37/3497 | (2013.01) | ||
| C23C 14/35 | (2013.01) | ||
| H01J 37/3405 | (2013.01) | ||
| H01J 37/3426 | (2013.01) | ||
| H01J 37/3429 | (2013.01) | ||
| H01J 37/3423 | (2013.01) |
| (11) | Number of the document | 3862460 |
| (13) | Kind of document | T |
| (96) | European patent application number | 21158423.0 |
| Date of filing the European patent application | 2014-08-14 | |
| (97) | Date of publication of the European application | 2021-08-11 |
| (45) | Date of publication and mention of the grant of the patent | 2023-02-15 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201361866006 P | 2013-08-14 | US |
| (72) |
West, Brian T. , US
Cox, Michael S. , US
Oh, Jeonghoon , US
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| (73) |
Applied Materials, Inc. ,
3050 Bowers Avenue, Santa Clara, CA 95054,
US
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| (54) | SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES |
| SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES |