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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/68 | (2006.01) |
| G03F 7/0002 | (2013.01) | ||
| H01L 21/687 | (2006.01) | ||
| G03F 7/7075 | (2013.01) | ||
| G03F 7/20 | (2006.01) | ||
| H01L 21/67754 | (2013.01) | ||
| H01L 21/67 | (2006.01) | ||
| H01L 21/68771 | (2013.01) | ||
| G03F 7/00 | (2006.01) | ||
| H01L 21/68785 | (2013.01) | ||
| B29C 59/02 | (2006.01) | ||
| B29C 59/00 | (2006.01) | ||
| B29C 43/02 | (2006.01) | ||
| H01L 21/677 | (2006.01) |
| (11) | Patento numeris | 3989269 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 21213772.3 |
| Europos patento paraiškos padavimo data | 2017-09-27 | |
| (97) | Europos patento paraiškos paskelbimo data | 2022-04-27 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2023-09-27 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (30) | Numeris | Data | Šalis |
| 201662416916 P | 2016-11-03 | US |
| (72) |
PATTERSON, Roy , US
AHAMED, Yaseer A. , US
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| (73) |
Molecular Imprints, Inc. ,
9801 Metric Boulevard
Suite 100, Austin, Texas 78758,
US
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| (54) | SUBSTRATE LOADING SYSTEM |
| SUBSTRATE LOADING SYSTEM |