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Legal status
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(51) | INT.CL. | G01K 1/143 | (2021.01) |
G01K 1/16 | (2013.01) | ||
G01K 1/16 | (2006.01) | ||
G01K 1/143 | (2013.01) |
(11) | Number of the document | 4158293 |
(13) | Kind of document | T |
(96) | European patent application number | 21728653.3 |
Date of filing the European patent application | 2021-05-26 | |
(97) | Date of publication of the European application | 2023-04-05 |
(45) | Date of publication and mention of the grant of the patent | 2024-07-03 |
(46) | Date of publication of the claims translation |
(86) | Number | PCT/IB2021/054562 |
Date | 2021-05-26 |
(87) | Number | WO 2021/240378 |
Date | 2021-12-02 |
(30) | Number | Date | Country code |
202007793 | 2020-05-26 | GB |
(72) |
FAULKNER, Budd Edward , US
|
(73) |
Edwards Vacuum LLC ,
6416, Inducon Drive West, Sanborn, NY 14132,
US
|
(54) | METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY |
METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY |