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LT - METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY
EN - METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY

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Bibliographic data
Indications of the International Patent Classification (IPC)
(51) INT.CL. G01K 1/143 (2021.01)
G01K 1/16 (2013.01)
G01K 1/16 (2006.01)
G01K 1/143 (2013.01)
European patent
(11) Number of the document 4158293
(13) Kind of document T
(96) European patent application number 21728653.3
Date of filing the European patent application 2021-05-26
(97) Date of publication of the European application 2023-04-05
(45) Date of publication and mention of the grant of the patent 2024-07-03
(46) Date of publication of the claims translation
PCT application
(86) Number PCT/IB2021/054562
Date 2021-05-26
PCT application publication
(87) Number WO 2021/240378
Date 2021-12-02
Priority applications
(30) Number Date Country code
202007793 2020-05-26 GB
Inventors
(72)
FAULKNER, Budd Edward , US
Grantee
(73) Edwards Vacuum LLC , 6416, Inducon Drive West, Sanborn, NY 14132, US
Title
(54) METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY
  METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY