|
|
|
|
|
Legal status
Patent lapsed (non-payment of fees)
| (51) | INT.CL.: (2006.01) |
G01N 21/17 G03H 1/00 G01R 31/00 |
| (11) | Number of the document | 5604 |
| (13) | Kind of document | B |
| (21) | Application number | 2007 075 |
| (22) | Date of filing the application | 2007-12-03 |
| (41) | Date of publication of the application | 2009-06-25 |
| (45) | Date of publication of patent | 2009-10-26 |
| (71) |
Vilniaus Universitetas,
Universiteto g. 3, LT-01513 Vilnius,
LT
|
| (72) |
Kęstutis JARAŠIŪNAS, LT
Arūnas KADYS, LT |
| (73) |
Vilniaus Universitetas,
Universiteto g. 3, LT-01513 Vilnius,
LT
|
| (74) |
Kęstutis JARAŠIŪNAS,
Ežero g. 23, LT-14159 Antežeriai, Vilniaus r.,
LT
|
| (54) | A METHOD FOR DETERMINATION OF DEEP LEVEL IMPURITY COMPENSATION RATIO IN SEMICONDUCTORS |
| Payment date | Validity (years) | Amount | |
| 2011-12-02 | 5 | 400.00 LTL |
| Patent lapsed (non-payment of fees) | ||
| Invalidation date | 2012-12-03 |