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Legal status
Patent lapsed (non-payment of fees)
| (51) | INT.CL.: (2011.01) |
G01N 21/00 H01L 21/00 |
| (11) | Number of the document | 5766 |
| (13) | Kind of document | B |
| (21) | Application number | 2009 075 |
| (22) | Date of filing the application | 2009-10-01 |
| (41) | Date of publication of the application | 2011-04-26 |
| (45) | Date of publication of patent | 2011-09-26 |
| (71) |
HSEB DRESDEN GmbH,
Manfred-von Ardenne-Ring 4, 01099 Dresden,
DE
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| (72) |
Marko DÖRING, DE
Dr. Bernd SROCKA, DE |
| (73) |
HSEB DRESDEN GmbH,
Manfred-von Ardenne-Ring 4, 01099 Dresden,
DE
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| (74) |
Jurga PETNIŪNAITĖ,
AAA Law, A. Goštauto g. 40B, Verslo centras "Dvyniai", LT-03163 Vilnius,
LT
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| (54) | INSPECTATION METHOD |
| Payment date | Validity (years) | Amount | |
| 2013-09-12 | 5 | 400.00 LTL |
| Patent lapsed (non-payment of fees) | ||
| Invalidation date | 2014-10-01 |