Patent details

EN | LT

LT - Naujas defektų formavimo būdas naudojant rentgeno spinduliuotę ir elektrinį lauką ir jo panaudojimas

EN - NEW DEFECT FORMING METHOD BY USING X-RAY AND ELECTRIC FIELD AND USING THEREOF

Legal status

Patent lapsed (non-payment of fees)

Claims | Abstract | Licences/Sublicenses

Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.: (2014.01)	H01L 21/00

Patent
(11)	Number of the document	6047
(13)	Kind of document	B
(21)	Application number	2012 094
(22)	Date of filing the application	2012-10-18
(41)	Date of publication of the application	2014-04-25
(45)	Date of publication of patent	2014-06-25

Applicant
(71)	VILNIAUS UNIVERSITETAS, Universiteto g. 3, LT-01513 Vilnius, LT

Inventors
(72)	Arvydas Juozapas JANAVIČIUS, LT Vitalij BALANDIN, LT Mindaugas VILIŪNAS, LT Saulius BALAKAUSKAS, LT Romaldas PURLYS, LT Andrius POŠKUS, LT

Grantee
(73)	VILNIAUS UNIVERSITETAS, Universiteto g. 3, LT-01513 Vilnius, LT

Attorney or representative
(74)	Jurga PETNIŪNAITĖ, AAA Law, A. Goštauto g. 40B, Verslo centras "Dvyniai", LT-03163 Vilnius, LT

Title
(54)	NEW DEFECT FORMING METHOD BY USING X-RAY AND ELECTRIC FIELD AND USING THEREOF

Last renewal fee
	Payment date	Validity (years)	Amount
	2020-10-19	9	208.00 EUR

Legal status
	Patent lapsed (non-payment of fees)
	Invalidation date	2021-10-18