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Legal status
Application published
| (51) | INT.CL.: (2026.01) |
C23C 14/00 |
| (11) | Number of the document | |
| (13) | Kind of document | A |
| (21) | Application number | 2024 528 |
| (22) | Date of filing the application | 2024-07-19 |
| (41) | Date of publication of the application | 2026-01-26 |
| (45) | Date of publication of patent |
| (71) |
I-Photonics UAB,
Parko g. 3, Avižienių k., LT-14198, Vilniaus raj.,
LT
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| (72) |
Khakhlou YAUHEN, LT
Aliaksandr MYSLIVETS, LT Rabatuyev HENADZ, TW |
| (73) |
I-Photonics UAB,
Parko g. 3, Avižienių k., LT-14198, Vilniaus raj.,
LT
|
| (74) |
Reda ŽABOLIENĖ,
METIDA, Verslo centras "VERTAS", Gynėjų g. 16, LT-01109 Vilnius,
LT
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| (54) | VACUUM DEVICE AND METHOD OF MANUFACTURING OF MULTILAYER THIN-FILM PRECISION OPTICAL COATINGS |