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LT - Burbulų susidarymo kritinės dozės matavimo būdas

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Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.: (2006.01)	H01L 21/66 H01L 21/66

Patent
(11)	Number of the document	2483
(13)	Kind of document	B
(21)	Application number	RP1350
(22)	Date of filing the application	1993-09-30
(41)	Date of publication of the application
(45)	Date of publication of patent	1994-02-15

PCT application
(86)	Number	1098465
	Date	1983-01-17

Applicant
(71)	Liudvikas PRANEVIČIUS, Partizanų g. 228-4, 3041 Kaunas, LT Arminas RAGAUSKAS, Saulės g. 39-10, 3031 Kaunas, LT Diana ADLIENĖ, Taikos pr. 62-72, 3031 Kaunas, LT

Inventors
(72)	Liudvikas PRANEVIČIUS, LT Arminas RAGAUSKAS, LT Diana ADLIENĖ, LT

Grantee
(73)	Liudvikas PRANEVIČIUS, Partizanų g. 228-4, 3041 Kaunas, LT Arminas RAGAUSKAS, Saulės g. 39-10, 3031 Kaunas, LT Diana ADLIENĖ, Taikos pr. 62-72, 3031 Kaunas, LT

Attorney or representative
(74)

Title
(54)

Last renewal fee
	Payment date	Validity (years)	Amount
	1997-09-25	7	61.00 LTL

Next renewal fee
	2000-09-30

Legal status
	Patent expired
	Invalidation date	1998-01-17