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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/302 | |
| G03F 7/00 | |||
| A61K 9/51 |
| (11) | Number of the document | 1704585 |
| (13) | Kind of document | T |
| (96) | European patent application number | 04821787.1 |
| Date of filing the European patent application | 2004-12-20 | |
| (97) | Date of publication of the European application | 2006-09-27 |
| (45) | Date of publication and mention of the grant of the patent | 2017-03-15 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2004/042706 |
| Date | 2004-12-20 |
| (87) | Number | WO 2005/101466 |
| Date | 2005-10-27 |
| (30) | Number | Date | Country code |
| 531531 P | 2003-12-19 | US | |
| 583170 P | 2004-06-25 | US | |
| 604970 P | 2004-08-27 | US |
| (72) |
DESIMONE, Joseph, M., US
ROLLAND, Jason, P., US
EXNER, Ansley, E., US
SAMULSKI, Edward, T., US
SAMULSKI, R., Jude, US
MAYNOR, Benjamin, W., US
EULISS, Larken, E., US
DENISON, Ginger, M., US
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| (73) |
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL,
308 Bynum Hall, Campus Box 4105, Chapel Hill, NC 27599-4105,
US
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| (54) | METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY |
| METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY |