|
|
|
|
|
Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/302 | |
| G03F 7/00 | |||
| A61K 9/51 |
| (11) | Patento numeris | 1704585 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 04821787.1 |
| Europos patento paraiškos padavimo data | 2004-12-20 | |
| (97) | Europos patento paraiškos paskelbimo data | 2006-09-27 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2017-03-15 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2004/042706 |
| Data | 2004-12-20 |
| (87) | Numeris | WO 2005/101466 |
| Data | 2005-10-27 |
| (30) | Numeris | Data | Šalis |
| 531531 P | 2003-12-19 | US | |
| 583170 P | 2004-06-25 | US | |
| 604970 P | 2004-08-27 | US |
| (72) |
DESIMONE, Joseph, M., US
ROLLAND, Jason, P., US
EXNER, Ansley, E., US
SAMULSKI, Edward, T., US
SAMULSKI, R., Jude, US
MAYNOR, Benjamin, W., US
EULISS, Larken, E., US
DENISON, Ginger, M., US
|
| (73) |
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL,
308 Bynum Hall, Campus Box 4105, Chapel Hill, NC 27599-4105,
US
|
| (54) | METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY |
| METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY |