LT - STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD
EN - STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD
Legal status
Patent not validated
Bibliographic data
Indications of the International Patent Classification (IPC)
| (51) |
INT.CL. |
H01L 21/027 |
|
|
|
G03F 7/20 |
|
European patent
| (11) |
Number of the document |
1713113 |
| (13) |
Kind of document |
T |
| (96) |
European patent application number |
05704182.4 |
|
Date of filing the European patent application |
2005-01-27 |
| (97) |
Date of publication of the European application |
2006-10-18 |
| (45) |
Date of publication and mention of the grant of the patent |
2010-12-29
|
| (46) |
Date of publication of the claims translation |
|
PCT application
| (86) |
Number |
PCT/JP2005/001076 |
|
Date |
2005-01-27 |
PCT application publication
| (87) |
Number |
WO 2005/074014 |
|
Date |
2005-08-11 |
Priority applications
| (30) |
Number |
Date |
Country code |
|
2004025837 |
2004-02-02
|
JP |
|
2004300566 |
2004-10-14
|
JP |
Inventors
| (72) |
SHIBAZAKI, Yuichi, JP
|
Grantee
| (73) |
NIKON CORPORATION,
12-1, Yurakucho 1-chome, Chiyoda-ku Tokyo 100-8331,
JP
|
Title
| (54) |
STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD |
| |
STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD |
