|
|
|
|
|
Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/66 | |
| G06T 1/20 | |||
| G06T 7/00 |
| (11) | Number of the document | 2195834 |
| (13) | Kind of document | T |
| (96) | European patent application number | 08831947.0 |
| Date of filing the European patent application | 2008-09-22 | |
| (97) | Date of publication of the European application | 2010-06-16 |
| (45) | Date of publication and mention of the grant of the patent | 2020-06-24 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2008/077203 |
| Date | 2008-09-22 |
| (87) | Number | WO 2009/039486 |
| Date | 2009-03-26 |
| (30) | Number | Date | Country code |
| 974030 P | 2007-09-20 | US | |
| 234201 | 2008-09-19 | US |
| (72) |
BHASKAR, Kris, US
BHASKAR, Chetana, US
KULKARNI, Ashok, US
ROSENGAUS, Eliezer, US
CAMPOCHIARO, Cecelia, US
MAHER, Chris, US
DUFFY, Brian, US
KHULLAR, Aneesh, US
KOHLI, Alpa, US
BALASUBRAMANIAN, Lalita, US
BHATTACHARYYA, Santosh, US
MAHADEVAN, Mohan, US
|
| (73) |
KLA-Tencor Corporation,
One Technology Drive, Milpitas, CA 95035,
US
|
| (54) | SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS |
| SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS |