|
|
|
|
|
Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/66 | |
| G06T 1/20 | |||
| G06T 7/00 |
| (11) | Patento numeris | 2195834 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 08831947.0 |
| Europos patento paraiškos padavimo data | 2008-09-22 | |
| (97) | Europos patento paraiškos paskelbimo data | 2010-06-16 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2020-06-24 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2008/077203 |
| Data | 2008-09-22 |
| (87) | Numeris | WO 2009/039486 |
| Data | 2009-03-26 |
| (30) | Numeris | Data | Šalis |
| 974030 P | 2007-09-20 | US | |
| 234201 | 2008-09-19 | US |
| (72) |
BHASKAR, Kris, US
BHASKAR, Chetana, US
KULKARNI, Ashok, US
ROSENGAUS, Eliezer, US
CAMPOCHIARO, Cecelia, US
MAHER, Chris, US
DUFFY, Brian, US
KHULLAR, Aneesh, US
KOHLI, Alpa, US
BALASUBRAMANIAN, Lalita, US
BHATTACHARYYA, Santosh, US
MAHADEVAN, Mohan, US
|
| (73) |
KLA-Tencor Corporation,
One Technology Drive, Milpitas, CA 95035,
US
|
| (54) | SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS |
| SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS |