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LT - ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS

EN - ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS

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Patent not validated

Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.	G01M 11/00
		G03F 7/20
		H01L 21/027

European patent
(11)	Number of the document	2282188
(13)	Kind of document	T
(96)	European patent application number	09754556.0
	Date of filing the European patent application	2009-05-12
(97)	Date of publication of the European application	2011-02-09
(45)	Date of publication and mention of the grant of the patent	2015-03-11
(46)	Date of publication of the claims translation

PCT application
(86)	Number	PCT/JP2009/058802
	Date	2009-05-12

PCT application publication
(87)	Number	WO 2009/145048
	Date	2009-12-03

Priority applications
(30)	Number	Date	Country code
	2008138841	2008-05-28	JP

Inventors
(72)	TANITSU Osamu, JP TANAKA Hirohisa, JP

Grantee
(73)	Nikon Corporation, 12-1, Yurakucho 1-chome Chiyoda-ku, Tokyo 100-8331, JP

Title
(54)	ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS
	ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS