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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G01M 11/00 | |
| G03F 7/20 | |||
| H01L 21/027 |
| (11) | Patento numeris | 2282188 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 09754556.0 |
| Europos patento paraiškos padavimo data | 2009-05-12 | |
| (97) | Europos patento paraiškos paskelbimo data | 2011-02-09 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2015-03-11 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/JP2009/058802 |
| Data | 2009-05-12 |
| (87) | Numeris | WO 2009/145048 |
| Data | 2009-12-03 |
| (30) | Numeris | Data | Šalis |
| 2008138841 | 2008-05-28 | JP |
| (72) |
TANITSU Osamu, JP
TANAKA Hirohisa, JP
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| (73) |
Nikon Corporation,
12-1, Yurakucho 1-chome Chiyoda-ku, Tokyo 100-8331,
JP
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| (54) | ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS |
| ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS |