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LT - LICHTBOGENVERDAMPFUNGS-BESCHICHTUNGSQUELLE

EN - ARC DISCHARGE EVAPORATION COATING SOURCE

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Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.	C23C 14/32
		C23C 14/34
		H01J 37/34
		B22F 7/06

European patent
(11)	Number of the document	2558608
(13)	Kind of document	T
(96)	European patent application number	11722273.7
	Date of filing the European patent application	2011-04-12
(97)	Date of publication of the European application	2013-02-20
(45)	Date of publication and mention of the grant of the patent	2014-06-18
(46)	Date of publication of the claims translation

PCT application
(86)	Number	PCT/AT2011/000175
	Date	2011-04-12

PCT application publication
(87)	Number	WO 2011/127504
	Date	2011-10-20

Priority applications
(30)	Number	Date	Country code
	23910 U	2010-04-14	AT

Inventors
(72)	POLCIK, Peter, AT POLZER, Conrad, DE PERL, Matthias, AT SCHLICHTHERLE, Stefan, AT STRAUSS, Georg, AT

Grantee
(73)	Plansee SE, 6600 Reutte, AT

Title
(54)	LICHTBOGENVERDAMPFUNGS-BESCHICHTUNGSQUELLE
	ARC DISCHARGE EVAPORATION COATING SOURCE