|
|
|
|
|
Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | C23C 14/32 | |
| C23C 14/34 | |||
| H01J 37/34 | |||
| B22F 7/06 |
| (11) | Patento numeris | 2558608 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 11722273.7 |
| Europos patento paraiškos padavimo data | 2011-04-12 | |
| (97) | Europos patento paraiškos paskelbimo data | 2013-02-20 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2014-06-18 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/AT2011/000175 |
| Data | 2011-04-12 |
| (87) | Numeris | WO 2011/127504 |
| Data | 2011-10-20 |
| (30) | Numeris | Data | Šalis |
| 23910 U | 2010-04-14 | AT |
| (72) |
POLCIK, Peter, AT
POLZER, Conrad, DE
PERL, Matthias, AT
SCHLICHTHERLE, Stefan, AT
STRAUSS, Georg, AT
|
| (73) |
Plansee SE,
6600 Reutte,
AT
|
| (54) | LICHTBOGENVERDAMPFUNGS-BESCHICHTUNGSQUELLE |
| ARC DISCHARGE EVAPORATION COATING SOURCE |