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Legal status
Patent not validated
| (51) | INT.CL. | H01J 37/05 | |
| H01J 37/317 | |||
| H05H 3/00 | |||
| H01L 21/02 | |||
| H01L 21/265 | |||
| H01L 21/311 |
| (11) | Number of the document | 2608872 |
| (13) | Kind of document | T |
| (96) | European patent application number | 11820497.3 |
| Date of filing the European patent application | 2011-08-23 | |
| (97) | Date of publication of the European application | 2013-07-03 |
| (45) | Date of publication and mention of the grant of the patent | 2019-07-31 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2011/048754 |
| Date | 2011-08-23 |
| (87) | Number | WO 2012/027330 |
| Date | 2012-03-01 |
| (30) | Number | Date | Country code |
| 201161490675 P | 2011-05-27 | US | |
| 201161484421 P | 2011-05-10 | US | |
| 201161473359 P | 2011-04-08 | US | |
| 37622510 P | 2010-08-23 | US |
| (72) |
KIRKPATRICK, Sean, R., US
KIRKPATRICK, Allen, R., US
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| (73) |
Exogenesis Corporation,
20 Fortune Drive, Billerica, Massachusetts 01821,
US
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| (54) | METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |
| METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |