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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01J 37/05 | |
| H01J 37/317 | |||
| H05H 3/00 | |||
| H01L 21/02 | |||
| H01L 21/265 | |||
| H01L 21/311 |
| (11) | Patento numeris | 2608872 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 11820497.3 |
| Europos patento paraiškos padavimo data | 2011-08-23 | |
| (97) | Europos patento paraiškos paskelbimo data | 2013-07-03 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2019-07-31 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2011/048754 |
| Data | 2011-08-23 |
| (87) | Numeris | WO 2012/027330 |
| Data | 2012-03-01 |
| (30) | Numeris | Data | Šalis |
| 201161490675 P | 2011-05-27 | US | |
| 201161484421 P | 2011-05-10 | US | |
| 201161473359 P | 2011-04-08 | US | |
| 37622510 P | 2010-08-23 | US |
| (72) |
KIRKPATRICK, Sean, R., US
KIRKPATRICK, Allen, R., US
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| (73) |
Exogenesis Corporation,
20 Fortune Drive, Billerica, Massachusetts 01821,
US
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| (54) | METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |
| METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |