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LT - MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION

EN - MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION

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Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.	C07F 11/00
		C07F 17/00
		C23C 16/40
		C23C 16/455
		B05D 1/00

European patent
(11)	Number of the document	2609102
(13)	Kind of document	T
(96)	European patent application number	11752057.7
	Date of filing the European patent application	2011-08-25
(97)	Date of publication of the European application	2013-07-03
(45)	Date of publication and mention of the grant of the patent	2014-12-31
(46)	Date of publication of the claims translation

PCT application
(86)	Number	PCT/US2011/049155
	Date	2011-08-25

PCT application publication
(87)	Number	WO 2012/027575
	Date	2012-03-01

Priority applications
(30)	Number	Date	Country code
	377692 P	2010-08-27	US

Inventors
(72)	HEYS, Peter, Nicholas, GB ODEDRA, Rajesh, GB HINDLEY, Sarah, Louise, GB

Grantee
(73)	Sigma-Aldrich Co. LLC, 3050 Spruce Street, St. Louis, MO 63103, US

Title
(54)	MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION
	MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION