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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | C07F 11/00 | |
| C07F 17/00 | |||
| C23C 16/40 | |||
| C23C 16/455 | |||
| B05D 1/00 |
| (11) | Patento numeris | 2609102 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 11752057.7 |
| Europos patento paraiškos padavimo data | 2011-08-25 | |
| (97) | Europos patento paraiškos paskelbimo data | 2013-07-03 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2014-12-31 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2011/049155 |
| Data | 2011-08-25 |
| (87) | Numeris | WO 2012/027575 |
| Data | 2012-03-01 |
| (30) | Numeris | Data | Šalis |
| 377692 P | 2010-08-27 | US |
| (72) |
HEYS, Peter, Nicholas, GB
ODEDRA, Rajesh, GB
HINDLEY, Sarah, Louise, GB
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| (73) |
Sigma-Aldrich Co. LLC,
3050 Spruce Street, St. Louis, MO 63103,
US
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| (54) | MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION |
| MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION |