|
|
|
|
|
Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/311 |
| (11) | Number of the document | 2624284 |
| (13) | Kind of document | T |
| (96) | European patent application number | 13153160.0 |
| Date of filing the European patent application | 2013-01-30 | |
| (97) | Date of publication of the European application | 2013-08-07 |
| (45) | Date of publication and mention of the grant of the patent | 2016-05-25 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201261593281 P | 2012-01-31 | US | |
| 201213717272 | 2012-12-17 | US |
| (72) |
Rue, Mr. Chad, US
|
| (73) |
FEI Company,
5350 NE Dawson Creek Drive, Hillsboro, OR 97124-5793,
US
|
| (54) | Low energy ion beam etch |
| Low energy ion beam etch |