Patent details

EN | LT

LT - DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD

EN - DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD

Legal status

Patent not validated

Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.	G03F 7/20

European patent
(11)	Number of the document	2669931
(13)	Kind of document	T
(96)	European patent application number	12739189.4
	Date of filing the European patent application	2012-01-27
(97)	Date of publication of the European application	2013-12-04
(45)	Date of publication and mention of the grant of the patent	2020-04-15
(46)	Date of publication of the claims translation

PCT application
(86)	Number	PCT/JP2012/000548
	Date	2012-01-27

PCT application publication
(87)	Number	WO 2012/102060
	Date	2012-08-02

Priority applications
(30)	Number	Date	Country code
	2011017265	2011-01-28	JP

Inventors
(72)	FUJIMOTO, Hiroshi, JP SAIKI, Kazuaki, JP SAKATA, Koichi, JP

Grantee
(73)	The University of Tokyo, 3-1, Hongo 7-chome, Bunkyo-ku, Tokyo 113-8654, JP Nikon Corporation, 15-3, Konan 2-chome Minato-ku, Tokyo 108-6290, JP

Title
(54)	DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD
	DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD