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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
(51) | INT.CL. | C25D 3/38 | |
C23C 18/38 | |||
C08L 79/02 | |||
C08G 73/02 | |||
C25D 7/12 | |||
H01L 21/768 | |||
H01L 21/288 |
(11) | Patento numeris | 2714807 |
(13) | Dokumento rūšis | T |
(96) | Europos patento paraiškos numeris | 12792059.3 |
Europos patento paraiškos padavimo data | 2012-05-31 | |
(97) | Europos patento paraiškos paskelbimo data | 2014-04-09 |
(45) | Paskelbimo apie Europos patento išdavimą data | 2019-01-02 |
(46) | Apibrėžties vertimo paskelbimo data |
(86) | Numeris | PCT/IB2012/052727 |
Data | 2012-05-31 |
(87) | Numeris | WO 2012/164509 |
Data | 2012-12-06 |
(30) | Numeris | Data | Šalis |
201161491935 P | 2011-06-01 | US |
(72) |
RÖGER-GÖPFERT, Cornelia, DE
ARNOLD, Marco, DE
FLÜGEL, Alexander, DE
EMNET, Charlotte, DE
RAETHER, Roman, Benedikt, DE
MAYER, Dieter, DE
|
(73) |
BASF SE,
Carl-Bosch-Strasse 38, 67056 Ludwigshafen am Rhein,
DE
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(54) | COMPOSITION FOR METAL ELECTROPLATING COMPRISING AN ADDITIVE FOR BOTTOM-UP FILLING OF THOUGH SILICON VIAS AND INTERCONNECT FEATURES |
COMPOSITION FOR METAL ELECTROPLATING COMPRISING AN ADDITIVE FOR BOTTOM-UP FILLING OF THOUGH SILICON VIAS AND INTERCONNECT FEATURES |